Model

SPNP-1000

SPOP-1000

SPHP-1000

SPHL-1000

SPAG-1000

SPMP-1000

Gas

N2 [Ar,He]

O2

H2

H2

Ar,[He]

NH3

Impurities

INLET

OUTLET

INLET

OUTLET

INLET

OUTLET

INLET

OUTLET

INLET

OUTLET

INLET

OUTLET

ppb

ppb

ppb

ppb

ppb

ppb

ppb

ppb

ppb

ppb

ppb

ppb

O2

≤ 1000

≤ 0.1

 

 

≤ 5000

≤ 1.0

≤ 5000

≤ 1.0

≤ 100

≤ 0.1

≤ 5000

≤ 10

CH4

≤ 1000 (*1)

≤ 0.1 (*1)

≤ 30000

≤ 0.1

 

 

≤ 1000

≤ 0.1

≤ 100

≤ 0.1

 

 

CO2

≤ 500

≤ 0.1

≤ 2000

≤ 0.1

≤ 1000

≤ 1.0

≤ 1000

≤ 0.1

≤ 100

≤ 0.1

 

 

CO

≤ 1000

≤ 0.1

≤ 1000

≤ 0.5

≤ 1000

≤ 1.0

≤ 1000

≤ 0.1

≤ 100

≤ 0.1

 

 

H2

≤ 1000

≤ 0.5

≤ 1000

≤ 0.5

 

 

 

 

≤ 100 (*2)

≤ 0.5 (*2)

 

 

N2

 

 

 

 

 

 

≤ 50000

≤ 0.1

≤ 2000

≤ 0.1

 

 

H2O

≤ 2600

≤ 0.1

≤ 2600

≤ 0.5

≤ 10000

≤ 1.0

≤10000

≤ 0.5

≤ 2600

≤ 0.1

≤ 0000

≤ 10

Particles

 

≤ 1pce/cft

≥ 0.1

 

≤ 1pce/cft

≥ 0.1

 

≤ 1pce/cft

≥ 0.1

 

≤ 1pce/cft

≥ 0.1

 

≤ 1pce/cft

≥ 0.1

 

≤ 1pce/cft

≥ 0.1

Pressure

0.5MpaG

≥ 0.4 MpaG

0.5MpaG

≥ 0.4 MpaG

0.5MpaG

≥ 0.4 Mpa G

0.7 MpaG

≥ 0.6 MpaG

0.5MpaG

≥ 0.4 MpaG

0.3 MpaG

≥ 0.2 MpaG

(*1)SPNP -100C model  (*2) SPAG-100H model

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